VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Molybdenum: Mo(3d5) & Mo(3d3), BE Cu(2p3)=932.71eV
1
0.05 eV/step, Sum of 15 repetitive etch/scans
NORM
REGULAR
1
0
0
0
0
0
1
0.05 eV/step, Sum of 15 repetitive etch/scans
Molybdenum: Mo(3d5) & Mo(3d3), BE Cu(2p3)=932.71eV
2003
4
28
23
24
5
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.23
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
240
-0.05
2
counts
d
Transmission
d
pulse counting
0.1
60
4.00E-06
0
0
0
0
802
152
15643
0.39737
0.400545
980
0.400545
994
0.400537
995
0.400529
990
0.400521
1008
0.400513
1051
0.400505
980
0.400497
996
0.400489
1046
0.400481
1056
0.400473
974
0.400465
1033
0.400457
990
0.400449
984
0.400441
974
0.400433
1044
0.400425
956
0.400417
985
0.400409
1016
0.400401
1092
0.400393
994
0.400385
1016
0.400377
1004
0.400369
1011
0.40036
1042
0.400352
1066
0.400344
1019
0.400336
1026
0.400328
1014
0.40032
1072
0.400312
969
0.400304
1064
0.400296
1018
0.400288
1015
0.40028
1006
0.400272
1004
0.400264
991
0.400256
1001
0.400248
933
0.40024
1028
0.400232
969
0.400224
1013
0.400216
932
0.400208
981
0.4002
1040
0.400192
992
0.400184
938
0.400176
964
0.400168
956
0.40016
995
0.400152
974
0.400144
968
0.400136
962
0.400128
902
0.40012
958
0.400112
917
0.400104
900
0.400096
857
0.400088
916
0.40008
901
0.400072
925
0.400064
880
0.400056
887
0.400048
831
0.40004
913
0.400032
857
0.400024
898
0.400016
859
0.400008
821
0.4
910
0.399992
895
0.399984
844
0.399976
866
0.399968
824
0.39996
833
0.399952
861
0.399944
823
0.399936
760
0.399928
886
0.39992
837
0.399912
833
0.399904
805
0.399896
817
0.399888
825
0.39988
800
0.399872
805
0.399864
807
0.399856
822
0.399848
773
0.39984
812
0.399832
818
0.399824
810
0.399816
771
0.399808
766
0.3998
800
0.399792
795
0.399784
789
0.399776
794
0.399768
796
0.39976
777
0.399752
808
0.399744
759
0.399736
798
0.399728
791
0.39972
811
0.399712
741
0.399704
820
0.399696
802
0.399688
803
0.39968
822
0.399672
822
0.399664
821
0.399656
857
0.399648
834
0.39964
861
0.399633
880
0.399625
807
0.399617
861
0.399609
861
0.399601
839
0.399593
833
0.399585
831
0.399577
883
0.399569
813
0.399561
924
0.399553
929
0.399545
878
0.399537
885
0.399529
913
0.399521
898
0.399513
938
0.399505
939
0.399497
966
0.399489
907
0.399481
929
0.399473
982
0.399465
990
0.399457
1083
0.399449
1031
0.399441
986
0.399433
1006
0.399425
1059
0.399417
1073
0.399409
1136
0.399401
1092
0.399393
1118
0.399385
1164
0.399377
1150
0.399369
1215
0.399362
1263
0.399354
1310
0.399346
1325
0.399338
1367
0.39933
1346
0.399322
1426
0.399314
1444
0.399306
1511
0.399298
1535
0.39929
1619
0.399282
1742
0.399274
1792
0.399266
1871
0.399258
1950
0.39925
2120
0.399242
2248
0.399234
2380
0.399226
2539
0.399218
2931
0.39921
3059
0.399202
3429
0.399194
3741
0.399186
4053
0.399179
4334
0.399171
5049
0.399163
5490
0.399155
6136
0.399147
6701
0.399139
7110
0.399131
7302
0.399123
7228
0.399115
7308
0.399107
6714
0.399099
6201
0.399091
5417
0.399083
4672
0.399075
4077
0.399067
3275
0.399059
2896
0.399051
2466
0.399043
2246
0.399035
1886
0.399028
1742
0.39902
1610
0.399012
1366
0.399004
1363
0.398996
1230
0.398988
1187
0.39898
1159
0.398972
1029
0.398964
1043
0.398956
1052
0.398948
1054
0.39894
1024
0.398932
1055
0.398924
1055
0.398916
968
0.398908
996
0.398901
1045
0.398893
1039
0.398885
1013
0.398877
968
0.398869
1017
0.398861
997
0.398853
1080
0.398845
1095
0.398837
1126
0.398829
1149
0.398821
1241
0.398813
1237
0.398805
1303
0.398797
1317
0.39879
1337
0.398782
1369
0.398774
1533
0.398766
1616
0.398758
1714
0.39875
1837
0.398742
1994
0.398734
2177
0.398726
2373
0.398718
2606
0.39871
3048
0.398702
3346
0.398694
3768
0.398686
4681
0.398679
5556
0.398671
6741
0.398663
8389
0.398655
10187
0.398647
12240
0.398639
14301
0.398631
15293
0.398623
15643
0.398615
14253
0.398607
12314
0.398599
9827
0.398591
7463
0.398584
5792
0.398576
4341
0.398568
3237
0.39856
2373
0.398552
1875
0.398544
1379
0.398536
1058
0.398528
858
0.39852
700
0.398512
580
0.398504
504
0.398497
399
0.398489
411
0.398481
423
0.398473
384
0.398465
361
0.398457
365
0.398449
330
0.398441
296
0.398433
275
0.398425
299
0.398417
274
0.39841
302
0.398402
262
0.398394
283
0.398386
260
0.398378
252
0.39837
252
0.398362
276
0.398354
252
0.398346
277
0.398338
252
0.398331
231
0.398323
258
0.398315
230
0.398307
249
0.398299
249
0.398291
223
0.398283
247
0.398275
229
0.398267
237
0.398259
240
0.398252
214
0.398244
214
0.398236
235
0.398228
254
0.39822
231
0.398212
236
0.398204
197
0.398196
223
0.398188
212
0.39818
202
0.398173
220
0.398165
194
0.398157
190
0.398149
198
0.398141
182
0.398133
198
0.398125
193
0.398117
204
0.398109
189
0.398102
195
0.398094
180
0.398086
191
0.398078
192
0.39807
181
0.398062
192
0.398054
172
0.398046
201
0.398039
174
0.398031
161
0.398023
188
0.398015
171
0.398007
204
0.397999
168
0.397991
157
0.397983
179
0.397975
194
0.397968
188
0.39796
171
0.397952
205
0.397944
186
0.397936
181
0.397928
200
0.39792
191
0.397912
167
0.397905
186
0.397897
193
0.397889
172
0.397881
170
0.397873
185
0.397865
169
0.397857
171
0.397849
185
0.397842
194
0.397834
178
0.397826
199
0.397818
188
0.39781
210
0.397802
209
0.397794
180
0.397787
192
0.397779
188
0.397771
168
0.397763
179
0.397755
194
0.397747
180
0.397739
171
0.397731
187
0.397724
170
0.397716
178
0.397708
187
0.3977
194
0.397692
178
0.397684
179
0.397676
166
0.397669
164
0.397661
190
0.397653
181
0.397645
152
0.397637
189
0.397629
186
0.397621
167
0.397614
170
0.397606
184
0.397598
200
0.39759
193
0.397582
153
0.397574
187
0.397566
192
0.397559
199
0.397551
178
0.397543
189
0.397535
188
0.397527
176
0.397519
186
0.397511
197
0.397504
186
0.397496
161
0.397488
178
0.39748
167
0.397472
178
0.397464
187
0.397456
171
0.397449
160
0.397441
159
0.397433
167
0.397425
192
0.397417
193
0.397409
200
0.397402
168
0.397394
174
0.397386
179
0.397378
182
0.39737
end of experiment
